By scanning an electron probe across a specimen, high resolution morphology or topography images of a specimen can be obtained, with great depth of field at very low or very high magnifications. Compositional analysis of a material may also be obtained by monitoring secondary X-rays produced by the electron-specimen interaction. Thus detailed maps of elemental distribution can be produced from multi-phase materials or complex, bio-active materials. Characterization of fine particulate matter in terms of size, shape, and distribution as well as statistical analyses of these parameters, may be performed.
Our SEM is a state-of-the-art ultra-high resolution Scanning Electron Microscope with a modern digital image processing system. It is a very useful instrument for studying integrated circuitry (IC) wafers, photoresist evaluation, IC research and development and IC production techniques, as well as material science, biological and industrial research.
Energy Dispersive Spectroscopy (EDS) is a spectrographic technique that identifies elemental composition within single particles in a sample matrix, providing qualitative and semi-quantitative information. Combining SEM and EDS techniques produces a powerful and versatile tool able to obtain wide ranges of information.